Subwavelength optical lithography via classical light: A possible implementation - 集成量子纳米光子学理论研究 | LabXing

array(2) { ["lab"]=> string(4) "1630" ["publication"]=> string(5) "14641" } Subwavelength optical lithography via classical light: A possible implementation - 集成量子纳米光子学理论研究 | LabXing

集成量子纳米光子学理论研究

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Subwavelength optical lithography via classical light: A possible implementation

2018

期刊 Physical Review A

作者 Jieyu You · Zeyang Liao · P. R. Hemmer · M. Suhail Zubairy

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卷 97
期 4
American Physical Society (APS)
ISSN: 2469-9926
DOI: 10.1103/physreva.97.043807

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