Microstructure and phase transformation of IGZO targets with different stoichiometry during sintering

array(2) { ["lab"]=> string(4) "1407" ["publication"]=> string(5) "12383" } Microstructure and phase transformation of IGZO targets with different stoichiometry during sintering - 先进靶材中心 | LabXing

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2020

期刊 Ceramics International

作者 Chao Qi · Jie Chen · Benshuang Sun · Shuai Liu · Min Liu · Yongchun Shu · Jilin He

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卷 46
期 8
页码 10568-10577
Elsevier BV
ISSN: 0272-8842
DOI: 10.1016/j.ceramint.2020.01.060

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