Investigation of spatial charge distribution and electrical dipole in atomic layer deposited Al2O3on 4H-SiC - 铁电器件课题组（王晓磊） | LabXing

array(2) { ["lab"]=> string(4) "1352" ["publication"]=> string(5) "11884" } Investigation of spatial charge distribution and electrical dipole in atomic layer deposited Al2O3on 4H-SiC - 铁电器件课题组（王晓磊） | LabXing

铁电器件课题组（王晓磊）

简介半导体存储器件

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Investigation of spatial charge distribution and electrical dipole in atomic layer deposited Al2O3on 4H-SiC

2016

期刊 Journal of Physics D: Applied Physics

作者 Kai Han · Xiaolei Wang · Li Yuan · Wenwu Wang

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卷 49
期 21
页码 215106
IOP Publishing
ISSN: 0022-3727
DOI: 10.1088/0022-3727/49/21/215106

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