High-Quality AlN Film Grown on Sputtered AlN/Sapphire via Growth-Mode Modification - 先进材料平台 | LabXing

array(2) { ["lab"]=> string(4) "1058" ["publication"]=> string(4) "8533" } High-Quality AlN Film Grown on Sputtered AlN/Sapphire via Growth-Mode Modification - 先进材料平台 | LabXing

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High-Quality AlN Film Grown on Sputtered AlN/Sapphire via Growth-Mode Modification

2018

期刊 Crystal Growth & Design

作者 Chenguang He · Wei Zhao · Hualong Wu · Shan Zhang · Kang Zhang · Longfei He · Ningyang Liu · Zhitao Chen · Bo Shen

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卷 18
期 11
页码 6816-6823
American Chemical Society (ACS)
ISSN: 1528-7483
DOI: 10.1021/acs.cgd.8b01045

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